On March 11, 2025,  ASML Holding N.V. and imec, a leading research hub in nanoelectronics and digital technologies, announced a new five-year strategic partnership aimed at advancing semiconductor innovation and promoting sustainability.

Pushing Semiconductor Technology to the Next Level

The partnership will leverage ASML's full product portfolio, including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology, and HMI single- and multi-beam technologies. These cutting-edge tools will be installed in imec's state-of-the-art pilot line and integrated into the EU- and Flemish-funded NanoIC pilot line, providing world-leading infrastructure for sub-2nm R&D.

Research will focus on silicon photonics, memory, and advanced packaging, supporting AI-driven semiconductor innovations across diverse markets.

Driving Sustainable Innovation

A key component of this renewed collaboration is a dedicated fund to support imec's pipeline of innovative ideas, particularly those delivering environmental and societal benefits — reinforcing the partners' commitment to sustainable development.

ASML President and CEO Christophe Fouquet highlighted the significance of this agreement:

"This marks the next step in our longstanding partnership with imec. It reflects our shared commitment to developing cutting-edge solutions for the semiconductor industry while supporting technology and innovations that benefit society at large."

imec President and CEO Luc Van den hove echoed this sentiment:

"We are thrilled to continue our unique collaboration with ASML, empowering the industry with the most advanced patterning solutions for over 30 years. Incorporating ASML's full product portfolio will expand our pilot line's capabilities, enabling the global semiconductor ecosystem to tackle AI-driven technological challenges. With sustainability now an explicit part of our partnership, this marks an exciting step forward.”

Backed by European Support

The partnership is bolstered by funding from the Chips Joint Undertaking, the Flemish government (supporting the EU Chips Act NanoIC pilot line), and the Dutch government as part of an Important Project of Common European Interest (IPCEI).

Additionally, the NanoIC pilot line is supported by EU programs, including Digital Europe (10118366) and Horizon Europe (101183277), alongside contributions from Belgium, France, Germany, Finland, Ireland, and Romania. The 0.55 NA technology at imec is part of the Next Gen-7A project (IPCEI22201), funded by the Dutch government under Europe's IPCEI initiative.